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Chemical Mechanical Polishing in Silicon Processing
By
Shin Hwa Li (editor) and
Robert O. Miller (editor)
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Bibliographic Detail
Publisher
Academic Pr
Publication date
October 15, 1999
Binding
Hardcover
Book category
Adult Non-Fiction
ISBN-13
9780127521725
ISBN-10
0127521720
Dimensions
0.75 by 6.25 by 9.25 in.
Weight
1.15 lbs.
Availability§
Out of Print
Original list price
$260.00
§As reported by publisher
Summaries and Reviews
Editions
Hardcover
The price comparison is for this edition
from Academic Pr (October 15, 1999)
9780127521725 | details & prices | 6.25 × 9.25 × 0.75 in. | 1.15 lbs | List price $260.00
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